AZO种子层朝向对ZnO纳米棒形貌和发光特性的影响  

Effect of the direction of AZO seed layer on morphologies and luminescence properties of ZnO nanorods

作　　者：林算治[1] 林丽梅[1] 林建平[1,2] 瞿燕[1] 赖发春[1] 

机构地区：[1]福建师范大学物理与光电信息科技学院,福建福州350007 [2]宁德师范学院物理与电气工程系,福建宁德352100

出　　处：《光电子．激光》2012年第6期1103-1108,共6页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金(11074041)资助项目

摘　　要：在水平管式炉中,采用热蒸发锌粉的方法,在镀有掺铝氧化锌(AZO)薄膜的石英基片上制备了大量高密度的ZnO纳米棒,AZO膜面分别正对和背对锌源。利用扫描电子显微镜、X射线衍射仪以及荧光光谱仪分析AZO膜面朝向对ZnO纳米棒的形貌、微结构及光学性能的影响。结果表明,不同朝向的AZO膜面上所生长的纳米棒具有相似的形貌和微结构。保温时间10min样品的氧空位的缺陷态发光为绿光,强度较强;保温时间15min样品的纳米棒长度较长、相对垂直衬底,其近带边发光较强,氧间隙的缺陷态发光较弱。正对锌源衬底上且保温时间15min样品的近带边发光最强,且缺陷态发光最弱。High density ZnO nanorods have been synthesized on Al-doped ZnO（AZO） film which was deposited on quartz substrates by magnetron sputtering,by thermally evaporating Zn powder without using any metal catalyst.The AZO films were intentionally positioned in two directions of face and back to the zinc source.Morphology,structure and optical properties of the samples were investigated by scanning electron microscopy（SEM）,X-ray diffraction（XRD） and fluorescence spectroscopy.The results show that the ZnO nanorods on the substrates with different directions have similar morphology and structure.Photoluminescence spectra demonstrate that the samples with 10 min growing time have a stronger green emission which is attributed to oxygen vacancies.For the samples with 15 min growing time,the nanorods are longer and more vertical,and have a stronger near band edge emission and a weaker oxygen interval emission.The sample grown on AZO film facing to the zinc sources and with 15 min growing time has the strongest near band edge emission and the weakest deep level energy emission.

关 键 词：ZNO纳米棒 热蒸发 衬底朝向 形貌 光致发光 

分 类 号：O472.3[理学—半导体物理]