硅基太阳电池的表面纳米织构及制备  

Surface Nanostructures of Silicon Solar Cells and Their Preparations

作　　者：陈燕坤[1] 韩伟华[1] 张严波[1] 徐锐[1] 王晓东[1] 李小明[1] 杨富华[1] 

机构地区：[1]中国科学院半导体研究所半导体集成技术工程研究中心,北京100083

出　　处：《微纳电子技术》2012年第6期388-395,共8页Micronanoelectronic Technology

基　　金：国家重点基础研究发展计划(973计划)资助项目(2010CB934104)

摘　　要：综述了用于硅基太阳电池高效陷光的四种表面纳米织构,即金属纳米颗粒、纳米线、纳米锥和纳米孔。相对于其他三种表面纳米织构,纳米孔具有更好的结构特性和陷光能力。详细介绍了各种表面纳米织构的制备方法,如金属薄膜退火、金属诱导化学腐蚀、干法刻蚀、深紫外光刻和纳米球光刻等。通过表面纳米织构提高效率是太阳电池领域的重点研究内容。表面纳米织构以其优异的光电特性,将在未来高效光伏器件中得到重要应用。Four kinds of surface nanostructures for the efficient light-trapping technique for silicon-based solar cells are summarized,i.e.the metal nanoparticle,nanowire,nanocone and nanohole.Compared with the other kinds of nanostructures,the nanohole has better structural pro-perty and light trapping ability.The fabrication methods of these nanostructures are introduced in detail,such as the metal film anneal,metal-catalyzed chemical etching,dry etching,deep UV lithography and nanosphere lithography.The improvement of the power conversion efficiency using the surface nanostructures is an important research in the field of solar cells.With its excellent optical and electrical characteristics,the surface nanostructures will have great potential applications in future high efficient photovoltaic devices.

关 键 词：硅基太阳电池 金属纳米颗粒 纳米线 纳米锥 纳米孔 

分 类 号：TM914.4[电气工程—电力电子与电力传动]