典型MEMS器件结构优化设计平台  

MEMS-Platform for Structural Design and Optimization of MEMS Facilities

作　　者：善盈盈[1] 卢德林[2] 

机构地区：[1]浙江机电职业技术学院机械工程系,浙江杭州310053 [2]浙江省机械工业情报研究所,浙江杭州310014

出　　处：《轻工机械》2012年第3期88-91,96,共5页Light Industry Machinery

摘　　要：设计一种适用于典型MEMS器件结构优化设计的通用平台系统MEMS Platform(简称MP)。该平台采用了柔性模块的设计理念,将整个优化设计过程分解成参数化建模、性能仿真、优化前后处理、优化算法选择与设计、优化结果输出等5个独立功能单元,解决了典型MEMS器件结构设计中经常出现的实际性能失真、优化计算过程复杂、计算量大等问题,具有较好的实际应用及再开发价值。The paper presented a kind of general platform system suitable for typical MEMS device structure optimum design MEMS platform（MP for shot）.This platform adopted design conception of flexible module and decomposed whole optimum design into five independent functional units-parametrization module,function simulation,optimal pre-after treatment,optimal algorithm option and design,outlet of optimal results etc.,thus solved the common problems occurred in typical MEMS device structure design,such as real function distortion,too complicated in optimal calculation,mass calculations etc..The MP posses with better practical application and redevelopment value.

关 键 词：MEMS器件 柔性模块 设计平台 结构优化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]