异丙醇溶液中电化学法制备类金刚石薄膜的研究  

Deposition of Diamond-like Carbon Films from 2-Propanol by Liquid Electrochemical Technique

作　　者：何洋洋[1] 张贵锋[2] 侯晓多[2] 曹保胜[1] 

机构地区：[1]大连民族学院物理与材料工程学院,大连116600 [2]大连理工大学材料科学与工程学院,大连116024

出　　处：《材料导报》2012年第12期90-92,共3页Materials Reports

基　　金：国家自然科学基金(11004021);中央高校基本科研业务费专项资金(DC10040122)

摘　　要：采用电化学方法,以分析纯的异丙醇溶液作为碳源,低温(60～70℃)常压条件下,在(100)硅片上沉积了类金刚石薄膜。利用扫描电子显微镜(SEM)、原子力显微镜(AFM)、拉曼光谱仪(Raman)和傅里叶变换红外光谱仪(FTIR)表征了薄膜的表面形貌和结构。结果表明,电解异丙醇溶液可以获得表面均匀致密且sp3碳含量较高的含氢类金刚石薄膜。Diamond like earbon（DLC） films were deposited by liquid electrochemical technique using 2-propanol as electrolyte at low temperature （60-70℃）. The morphology and microstructure of the films were analyzed by scan ning electron microscopy（SEM）, atomic force microscopy（AFM）, Raman spectroscopy and Fourier transform infrared spectroscopy（b-FIR）. The characterizations suggested that hydrogenated DI.C films with smooth and uniform surface and significant sp：~ carbon were successfully deposited.

关 键 词：类金刚石薄膜 电化学沉积 拉曼光谱 傅里叶变换红外光谱 

分 类 号：O484[理学—固体物理] TB321[理学—物理]