空间调制傅里叶变换红外光谱仪多级微反射镜倾斜误差分析  

Analysis of Multi-Micromirrors Tilt Error in Space-Modulated Fourier Transform Infrared Spectrometry

作　　者：郑莹[1,2] 梁静秋[1] 梁中翥[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院研究生院,北京100049

出　　处：《光谱学与光谱分析》2012年第7期1999-2002,共4页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金项目(61027010;60977062);国家(863计划)(2009AA04Z315)资助

摘　　要：空间调制傅里叶变换红外光谱仪无可动部件,系统稳定而紧凑,而且程差可控,可实现在线监测和实时检测。多级微反射镜是光谱仪干涉系统的关键器件,其在系统中的位置精度对光谱仪性能影响很大。本文对多级微反射镜的倾斜误差引起的光程差变化进行了理论计算,并利用光学软件进行了模拟仿真。分析结果表明,随着多级微反射镜倾斜角度的增大,干涉图对比度下降,对应的光谱图脉冲谱线展宽,信噪比下降,严重时会出现波数偏离。以上分析方法对后期系统公差分配及装调有着重要的指导意义。The system of space-modulated Fourier transform infrared spectrometer without moving parts is stable and compact, moreover, it can realize the on-line monitoring and real-time detection. The position accuracy of muhi-mieromirrors as the key components has a great influence on spectrometric performance. In the present paper, the muhi-mcromirrors tilt error caused by optical path difference changes was calculated and simulated. The analysis shows that, as the multi-micromirrors tilt angle in- creased, the interference pattern contrast decreased and the signal to noise ratio reduced. The results could be used in the toler- ance distribution and the systemic alignment in the next step.

关 键 词：傅里叶变换 空间调制 红外光谱仪 多级微反射镜 误差分析 

分 类 号：O433.1[机械工程—光学工程]