调制比对C/C多层膜结构及性能的影响  

Influence of Modulation Ratio on Microstructures and Properties of C/C Multilayer Films

作　　者：沟引宁[1,2] 黄楠[1] 孙鸿[1] 

机构地区：[1]西南交通大学材料先进技术教育部重点实验室四川省人工器官表面工程重点实验室,成都610031 [2]重庆理工大学材料科学与工程学院,重庆400054

出　　处：《真空科学与技术学报》2012年第6期519-523,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金资助项目(No.30270392);四川省科技攻关项目资助(No.05GG1084)

摘　　要：考察了C(硬)/C(软)调制比对多层膜结构和性能的影响。采用磁过滤直流阴极真空弧源沉积技术制备了C/C多层膜,通过Raman光谱对多层膜的结构进行了表征;用硬度计和销盘式摩擦磨损试验机测试了多层膜的硬度及摩擦学性能。结果表明:所制备的多层膜呈现类金刚石结构并具有良好的耐磨性,其摩擦系数均小于0.15;随多层膜中软膜比例的增大,薄膜中sp2簇的数量逐渐增多,薄膜显维硬度呈现下降趋势,多层膜的耐磨性能下降。The multi-layers of the carbon （hard）/carbon （soft） were grown by filtered cathode vacuum arc deposition on substrates of Si crystal and GCrl5 steel. The influencing growth factors, including the modulation ratio, bias voltage,and deposition rate, were evaluated. The microstructures and mechanical properties of the C/C multi-layers were characterized with Raman spectroscopy and mechanical conventional probes. The results show that the typical diamond- like C/C multi-layers significantly improve the wear resistance of the substrate, with a minimum friction coefficient less than 0.15, and that the number of the sp2 cluster markedly depends on the modulation ratio. As the layer thickness of the soft carbon increased, the density of sp2 cluster increased, but both the surface hardness and wear resistance decreased.

关 键 词：C/C多层膜 磁过滤直流阴极真空弧源 类金刚石 耐磨性 

分 类 号：O484[理学—固体物理]