一种三明治结构透明导电薄膜的制备及光电性能  

Preparation and photoelectrical properties of a kind of transparent conductive multi-layer film

作　　者：周继承[1] 杨延林[1] 

机构地区：[1]中南大学物理科学与技术学院,湖南长沙410083

出　　处：《应用科技》2012年第2期80-84,共5页Applied Science and Technology

基　　金：湖南省科技计划重大专项基金资助项目(08FJ1002)

摘　　要：采用直流磁控溅射法制备了ZAO/Cu/ZAO多层透明导电薄膜,研究了参铝氧化锌(ZAO)薄膜厚度对多层膜晶体结构和光电特性的影响.用X射线衍射仪、原子力显微镜、紫外可见光分光光度计及四探针对样品的晶体结构与光电性能等进行了表征.结果表明,多层膜的平均透过率最高达86%,方块电阻达9/sq;ZAO膜层厚度对多层膜的导电性能影响很小,但严重影响可见光透过率;多层膜中的ZAO层仍呈ZnO晶态结构,且具有明显的c轴取向特征.这种三明治结构是一种性能优良的太阳能透明导电层候选材料.ZAO/Cu/ZAO multi-layer transparent conductive film was prepared by direct current （DC） magnetron sputtering method. The effects of Al-doped ZnO （ZAO） layer thickness on the crystal structures and photoelectrical properties of multi-layers were studied by XRD, atomic force microscope, UV-Vis spectrophoto meter and four-point probe method, respectively. The experimental results show that the maximum average transmittance of multi-layers is 86%, a sheet resistance is 10 Ω/sq. The sheet resistance changes slightly while the visible light transmittance changes obviously with the variation of ZAO layer thickness. The ZAO layer of the multi-layers still presents a ZnO crystalline state, with an obvious c-axis orientation trend. This kind of sandwich multi-layer is proposed as a candidate with excellent properties for solar transparent conductive materials.

关 键 词：磁控溅射 透明导电薄膜 ZAO/Cu/ZAO多层膜 光电特性 

分 类 号：O484.4[理学—固体物理]