ECCVD法制备单壁碳纳米管  

Single-Walled Carbon Nanotubes Synthesized by ECCVD

作　　者：王茂发[1] 潘志安[1] 邹小平[2] 程进[2] 袁静[1] 杨秋格[1] 欧阳群波[1] 

机构地区：[1]防灾科技学院灾害信息工程系,北京101601 [2]北京信息科技大学传感器中心,北京100101

出　　处：《微纳电子技术》2012年第7期462-466,共5页Micronanoelectronic Technology

基　　金：中央高校基本科研业务费专项资金2011年度青年教师资助计划项目(ZY20110212)

摘　　要：采用催化化学气相沉积法,以乙醇作为碳源,二茂铁为催化剂前驱体,高纯度的N2和3%H2/Ar为载气,在反应温度850℃下,制备出了高质量的单壁碳纳米管。采用该方法制备单壁碳纳米管,具有反应温度相对较低以及碳源(液态乙醇)丰富、廉价的优点。分别采用SEM,TEM和喇曼光谱等手段对制备出的样品进行了微观结构表征,并对表征结果进行分析计算。结果表明单壁碳纳米管集结成束状,直径约为1.2nm,其直径分布范围较窄,缺陷较少,产量相对丰富。With the ethanol as carbon source, the ferrocene as catalyst precursor, high pure N2 and 3% H2/Ar as carrier gas, the high-quality single-walled carbon nanotubes （SWCNTs） were synthesized by ethanol catalytic chemical vapor deposition （ECCVD） at the reaction temperature of 850 ℃. The preparation method has advantages of the relatively low reaction temperature and the abundant and cheap carbon source （liquid ethanol）. The prepared samples were characterized by SEM, TEM and Raman spectrum, respectively, and the characterization results were ana- lyzed. The results show that the mass SWCNTs show the bundle shape with about 1.2 nm dia- meter and the relatively narrow distribution of diameter, the SWCNT has less structure defect and the product is relatively abundant.

关 键 词：催化化学气相沉积(ECCVD) 单壁碳纳米管 二茂铁 膜状产物 低温 

分 类 号：TB383[一般工业技术—材料科学与工程]