直流溅射掺杂Pt的SnO2薄膜气敏特性  

Study on Properties of Pt-doped by Direct Current Sputtering SnO_2 Gas-sensitive Thin Film

作　　者：洪求三[1] 傅刚[2] 余建立[1] 

机构地区：[1]巢湖学院电子工程与电气自动化学院,巢湖238000 [2]广州大学物理与电子工程学院,广州510006

出　　处：《复旦学报（自然科学版）》2012年第3期344-348,共5页Journal of Fudan University：Natural Science

基　　金：安徽省高校自然科学研究基金资助项目(KJ2012B115)

摘　　要：采用非醇盐溶胶-凝胶工艺在Al2O3基片上旋转涂敷制备掺杂Sb的SnO2薄膜,再经直流溅射制得表面掺杂Pt的Sb∶SnO2薄膜,测试了薄膜对乙醇、汽油、苯、二甲苯、甲苯、丙酮和NH3气体的气敏性能,探讨了不同Pt掺杂量对乙醇气敏性能的影响.结果表明,Pt的溅射时间为90 s时,元件对50×10-6乙醇气体的灵敏度高达43,且薄膜具有较好的响应-恢复特性,其响应时间和恢复时间均为6 s.选择性研究表明,薄膜在加热温度为280℃时,具有很好的酒敏特性和选择性.Sb-doped SnO2 thin films are deposited on Al2O3 substrates by spin-coating using unalcolate sol-gel synthesis.Then Pt-doped Sb-SnO2 thin films were deposited by means of sputtering.The gas sensing property of gas sensor to alcohol,gasoline,benzene,xylene,toluene,acetone and NH3 was measured via the static volumetric method.It＇s discussed on the effect on the sensitivity of thin films to different amount of Pt.The results indicate that the maximum sensitivity is 43 for 50×10-6 alcohol vapor from SnO2 thin films sputtering Pt for 90 s.Moreover,such sensor exhibits superior response-recovery characteristics and its response time and recovery time are 6 s.The sensors were found to obtain better alcohol sensitivity and be excellent selectivity for alcohol detection through selectivity experiment at 280 ℃ heating temperature.

关 键 词：SNO2薄膜 PT掺杂 乙醇 气敏性能 

分 类 号：TN304[电子电信—物理电子学]