高控位精度横向模压电微位移器的研究  

Study of High Resolution Lateral Piezoelectric Actuator

作　　者：张望重[1] 陈大任[1] 朱精敏 

机构地区：[1]中国科学院无机功能材料开放实验室,上海硅酸盐研究所上海200050 [2]浙江大学(西溪校区)物理系,浙江杭州310027

出　　处：《功能材料》2000年第B05期108-110,共3页Journal of Functional Materials

摘　　要：介绍了d31 横向伸缩模式压电微位移驱动器的制作过程 ,应用高稳定的填满钨青铜型压电陶瓷作为该器件制备的基料 ,利用P -F干涉仪原理测量了电场 -位移特性曲线 ,由此计算了压电常数d31 ,并进行了讨论。该器件具有电控应变 (位移 )线性度高、滞后量小以及结构简单、制作工艺方便等特点 ,它在精密光学等技术领域有一定应用价值。The preparation of lateral model (d 31 ) piezoelectric actuator was reported in this paper.A high-steady piezoelectric ceramic with tungsten bronze structure was used as the basic material of the actuator,and its piezoelectric induced displacement curve was measured by using the principle of F-P interferometer as well as the lateral piezoelectric constant (d 31 ). As discussed,this kind of actuator features high linearity and small hysteresis between induced displacement and applied electric field,meanwhile its structure is simple and easy to be fabricated.This actuator should have its applications in field of precise machinery.

关 键 词：压电陶瓷 微位移驱动器 逆压电效应 压电常数 

分 类 号：TH703.8[机械工程—仪器科学与技术] TN384[机械工程—精密仪器及机械]