2.5 keV能点多层膜KB显微镜成像性能  

Imaging characteristics of 2.5 keV multilayer Kirkpatrick-Baez microscope

作　　者：伊圣振[1,2,3] 穆宝忠[1,2,3] 蒋励[1,2,3] 朱京涛[1,2,3] 王占山[1,2,3] 曹柱荣[4] 董建军[4] 

机构地区：[1]同济大学,上海200092 [2]同济大学教育部先进微结构材料重点实验室,上海200092 [3]同济大学精密光学工程技术研究所,上海200092 [4]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《强激光与粒子束》2012年第8期1770-1774,共5页High Power Laser and Particle Beams

基　　金：国家自然科学基金科学仪器专项(11027507);国家自然科学基金项目(10825521);上海市青年科技启明星计划项目(10QA1406900);教育部新世纪优秀人才支持计划项目(NCET-10-0631);上海市科学技术委员会优秀学科带头人计划项目(09XD1404000)

摘　　要：研究了Kirkpatrick-Baez(KB)显微镜成像系统的结构设计、元件制备。通过分析掠入射角、放大倍数和反射镜曲率半径对成像系统调制传递函数(MTF)的影响,确定了KB显微镜系统的初始结构参数,实现了2.5 keV能点多层膜KB显微镜的设计、制备以及装调,在神光Ⅱ强激光装置上完成了像质标定实验。结果表明:2.5 keV能点多层膜KB显微镜在100μm视场内观测周期为20μm平面调制靶时的MTF高于0.6,与OMEGA装置同类型KB系统的空间分辨能力相当,明显优于现有的针孔相机和点投影成像技术。该显微镜与条纹相机配合,已成功实现对短扰动波长平面调制靶烧蚀演化行为的动态诊断。A 2.5 keV multilayer Kirkpatrick-Baez microscope was developed and its imaging characteristics were studied from aspects of optical design and experimental calibration.The optical parameters were determined by analyzing the influences of grazing incidence angle,magnification,and radius of curvature on modulation transfer function（MTF）.The multilayer,simultaneously working at 2.5 keV and 8 keV,was designed and coated to complete the system alignment.The imaging result at ShenguangⅡ laser facility shows that the MTF over the object field of 100 μm is above 0.6 for 20 μm wavelength,significantly better than those of the existing pinhole camera and point-projection X-ray radiography.The microscope,coupled with the streak camera,can be used for dynamic diagnostics of target ablation with small spatial perturbation mode.

关 键 词：Kirkpatrick-Baez显微镜 等离子体诊断 调制传递函数 平面调制靶 流体力学不稳定性 

分 类 号：O434.1[机械工程—光学工程]