非本征F-P干涉仪式光纤触觉传感器的研究  

Optical fiber tactile sensor based on extrinsic Fabry-Perot interferometer

作　　者：郝华丽[1] 荆振国[1] 程华奇[1] 李虹[1] 邢传奇[1] 

机构地区：[1]大连理工大学物理与光电工程学院,辽宁大连116024

出　　处：《光电子．激光》2012年第8期1431-1435,共5页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金(60907035);中央高校基本科研业务科研业务费专项资金(DUT11LK41)资助项目

摘　　要：基于法布里-珀罗(F-P)干涉原理,设计制作了具有核磁共振成像(MRI)兼容能力的光纤非本征F-P干涉仪(EFPI)结构的触觉传感器。在整个光纤触觉传感系统中,利用螺旋微控装置对传感器施加力,通过光谱分析(OSA)测量干涉光谱,利用交叉相关解调技术解调出传感器腔长,同时由FS20系列力传感器进行标定。对传感器的性能指标进行了分析,本文传感器的测量范围为0～3N,测量分辨率为0.02nm,多次测量结果显示和理论的吻合度较高。Magnetic resonance imaging （MRI） compatible tactile sensor has a practical significance in clin- ical medicine. In this paper,based on extrinsic Fabry-Perot （FP） interferometric （EFPI） principle, an optical fiber tactile sensor with MRI-compatible ability is designed. In the tactile sensing system the force is exerted on the sensor by spiral micro-control device. Interference spectra of the F-P sensor are measured by means of the optical spectrum analyzer（OSA） and gap lengths of the EFPI sensor are achieved with the cross correlation calculation. At the same time, the calibration of the sensor is conducted by FS20 series force sensor. The performance of the sensor is analyzed, its measurement range is 0-3 N and resolution is 0.02 nrrL Multiple measurements show that experimental results are in good agree- ments with the theoretical results.

关 键 词：触觉传感器 光纤 非本征法布里-珀罗干涉仪 核磁共振成像兼容 

分 类 号：TN253[电子电信—物理电子学]