不同偏压对沉积CrMoN涂层耐磨性能的影响  

EFFECT OF BIAS-VOLTAGE ON WEAR RESISTANCE OF CrMoN COATINGS

作　　者：苑俊峰[1] 施雯[1] 李潇[1] 张健[1] 

机构地区：[1]上海大学材料科学与工程学院,上海200072

出　　处：《上海金属》2012年第4期12-15,共4页Shanghai Metals

摘　　要：采用非平衡闭合场磁控溅射技术,在冷作模具钢Cr12MoV表面制备不同偏压CrMoN涂层。通过XRD、SEM、显微硬度和磨损试验分析等方法考察涂层的相结构、力学性能与耐磨性。实验结果表明:呈面心立方结构的CrMoN涂层不同程度地强化了基体表面(HV_(0.25N)1 000～1 800),摩擦系数降低至0.3～0.35,经18 h磨损试验后,60、75 V偏压沉积的涂层的磨损体积(2.01×10 ^(-3)mm^3)约为未处理试样磨损体积(10.01×10^(-3)mm^3)的1/5。涂层磨损机理主要为"微犁沟"的磨粒磨损。CrMoN coatings were prepared on Crl2MoV steel surface by a closed field unbalanced sputtering technique under the action of different bias-voltage. The coated surface properties were characterized by XRD, SEM, micro hardness and wear tests. The experimental results showed that the CrMoN coating was composed of a fcc structure, which strengthened the coated surface with micro hardness from HV0 25N 1 000 to HV0 25N 1 800 and decreased the friction coefficiency about 0.3 -0.35. The wear volume of coatings prepared under 60 V and 75 V was 2.01 - 10^-3mm^3 after 18 hours＇ sliding, which was one fifth of the uncoated specimen＇ s （10.01 - 10^-3mm^3） under the same condition. The wear mechanism acted on these coatings could be described mainly as abrasive wear with ＂ ＂ ＂ mmro-scratch .

关 键 词：CR12MOV钢 非平衡磁控溅射 CrMoN涂层 摩擦磨损 

分 类 号：TG174.442[金属学及工艺—金属表面处理]