物理气相沉积对离子交换玻璃中钾离子浓度的影响(英文)  

Effect of Physical Vapor Deposition on Potassium Ion Concentration in Ion-Exchanged Glass

作　　者：张文杰[1] 谢紫娟[1] 马磊[2] 王兆祥 

机构地区：[1]玉林师范学院物理科学与工程技术学院,广西玉林537000 [2]华南理工大学材料科学与工程学院,广州510640 [3]深圳市深新隆实业有限公司,广东深圳518055

出　　处：《硅酸盐学报》2012年第8期1224-1228,共5页Journal of The Chinese Ceramic Society

基　　金：广西教育厅科研项目(200911LX369)资助项目

摘　　要：采用真空烘烤热蒸发沉积和离子束辅助沉积两种方法在离子交换玻璃上分别镀制ZnS薄膜,用扫描电镜和电子探针线扫描分析了物理气相沉积对离子交换玻璃中K+浓度的影响,并测量了经不同方法镀膜玻璃的抗弯强度。结果表明:镀膜的离子交换玻璃中K+的分布峰值减小并从玻璃表面向玻璃内部移动;与真空烘烤热蒸发沉积相比,离子束辅助沉积ZnS薄膜的离子交换玻璃中K+的分布峰值增大且继续向玻璃内部移动,K+浓度分布也随之移动,并导致离子交换玻璃力学性能下降。ZnS films were deposited on ion-exchanged glass by different physical vapor deposition techniques （i.e., baking, thermal evaporation and ion-assisted deposition）. The effect of physical vapor deposition on the potassium ion concentration in ion-exchanged glass was investigated by scanning electron microscope and electron probe microanalysis method. The bending strength of glass de- posited films by different deposition techniques was measured. The results indicate that the peak of potassium concentration profile of ion-exchanged glass deposited films decreases and moves from glass surface to the inner part, which is different from that in ion ex- changed glass. Compared to thermal evaporation physical vapor deposition technique, the peak of potassium concentration distribu- tion in ion-exchanged glass shifts to a greater depth and the intensity and magnitude of the potassium peak also increase when depos- ited by an ion beam-assisted e-beam physical vapor deposition. Besides, the potassium concentration distribution profile moves in- ward the glass, resulting in the degradation of ion-exchanged glass mechanical properties.

关 键 词：物理气相沉积 离子交换玻璃 钾离子浓度 扩散 

分 类 号：TQ171[化学工程—玻璃工业]