高压对高功率脉冲磁控放电等离子体注入与沉积氧化钒薄膜的影响  

Influence of high voltage on vanadium oxide films fabricated by high power pulsed magnetron discharge plasma ion implantation & deposition

作　　者：李春伟[1,2] 巩春志[1] 吴忠振[1] 刘天伟[3] 秦建伟[3] 田修波[1] 杨士勤[1] 

机构地区：[1]哈尔滨工业大学先进焊接与连接国家重点实验室,黑龙江哈尔滨150001 [2]东北林业大学森林持续经营与环境微生物工程黑龙江省重点实验室,黑龙江哈尔滨150040 [3]中国工程物理研究院表面物理与化学国家重点实验室,四川绵阳621900

出　　处：《功能材料》2012年第14期1922-1926,共5页Journal of Functional Materials

基　　金：表面物理与化学国家重点实验室开放基金资助项目(SPC201104)

摘　　要：利用高功率脉冲磁控放电等离子体注入与沉积技术制备了氧化钒薄膜,分别采用X射线衍射仪、原子力显微镜、扫描电子显微镜和电化学分析仪研究了不同高压幅值对氧化钒薄膜的相结构、表面形貌、截面形貌以及耐腐蚀性能的影响。结果表明制备的氧化钒薄膜以VO2(-211)相为主,还含有少量的VO2(111)、VO(220)、VO(222)相。不同高压下氧化钒薄膜表面致密、平整,其表面粗糙度仅为几个纳米,显示出良好的表面质量。氧化钒薄膜表现出典型致密的柱状晶生长形貌,且随着高压增加,氧化钒薄膜膜层厚度有所下降。氧化钒薄膜耐腐蚀性能较纯铝基体有较大提高,腐蚀电位提高0.093V,腐蚀电流下降1～2个数量级;当高压为-15kV时,氧化钒薄膜腐蚀电位最高,腐蚀电流最低,表现出最佳的耐蚀性能。Vanadium oxide films were fabricated using high power pulsed magnetron discharge plasma ion implantation and deposition technique（HPPMS-PIID）,influence of amplitudes of high voltage on phase structure,surface morphology,cross-sectional morphology,and corrosion resistance of vanadium oxide films has been investigated by X-ray diffraction（XRD）,atomic force microscopy（AFM）,scanning electron microscopy（SEM）,and electrochemical tester respectively.XRD showed mainly VO2（111）,also contained a small amount of VO2（111）,VO（220）,VO（222） phase.Vanadium oxide films surface were relatively dense and smooth under different high voltages,whose surface roughness were only a few nanometers,which showed good surface quality;vanadium oxide films all represent typical of the density of the columnar crstal growth outlook,vanadium oxide films thickness declined with high voltages.Corrosion resistance of vanadium oxide films improved greatly than pure aluminum,vanadium oxide films corrosion potential was supreme and the corrosion potential increases by 0.093V,but the corrosion current decreases by an order of magnitude;corrosion current was minimum at-15kV,which showed the best corrosion resistance.

关 键 词：高功率脉冲磁控放电 等离子体离子注入与沉积 氧化钒薄膜 高压 耐腐蚀性 

分 类 号：TG174[金属学及工艺—金属表面处理]