双悬臂梁直径测量传感器性能分析  

Performance analysis on twin-cantilever transducer for measuring diameter

作　　者：乔龙学[1] 王伟刚[1] 何姗[2] 鲁阳[2] 

机构地区：[1]浙江大学机械工程学系,浙江杭州310027 [2]浙江大学航空航天学院,浙江杭州310027

出　　处：《浙江大学学报（工学版）》2012年第6期1060-1066,共7页Journal of Zhejiang University：Engineering Science

基　　金：国家自然科学基金资助项目(10572127);浙江省自然科学基金资助项目(Z1110190)

摘　　要：为解决目前材料力学性能试验中试样横截面尺寸测量技术存在的问题,开发了双悬臂梁直径测量传感器及测量系统.用梁弯曲理论和应变电测理论说明这种传感器及测量系统的测量原理,分析测量灵敏度和分辨率.设计、制作传感器,与直径标准器和电阻应变测量仪配合,组成测量系统.利用测量系统进行直径测量实验,并通过对实验数据和测量系统各单元作用特性的分析,确定测量系统的主要误差来源.实验结果表明:测量系统的分辨率达到0.2μm,绝对误差限为4μm.A twin-cantilever transducer and diameter measurement system was developed to solve the problems in the dimension measurement of cross section of samples in material testing.Beam bending and strain gauge theories were used to explain the measuring principles of this apparatus,and the sensitivity and resolution of this measurement system were analyzed in particular.An experimental system,including a twin-cantilever transducer,a set of master diameter gauge,and a resistance strain meter,was designed.Then,calibration and diameter measurement experiments were carried out.By analyzing the experimental dada and the characteristics of each principal unit of the experimental system,the available measurement resolution and the absolute uncertainty were discussed.The experimental results showed that the resolution reached 0.2 μm,and the uncertainty was limited in 4 μm.

关 键 词：双悬臂梁传感器 直径测量 灵敏度 分辨率 

分 类 号：TH821[机械工程—仪器科学与技术]