强激光光学元件表面功率谱密度函数估计  

POWER SPECTRAL DENSITY FUNCTION ESTIMATE IN HIGH POWER LASER OPTICAL ELEMENT SURFACE

作　　者：沈卫星[1] 徐德衍[1] 

机构地区：[1]高功率激光物理国家实验室,中科院上海光机所,上海800211信箱201800

出　　处：《强激光与粒子束》2000年第4期392-396,共5页High Power Laser and Particle Beams

基　　金：国家863惯性约束聚变领域资助课题!(L4162210)

摘　　要：在扼要描述了光学元件表面轮廓测量中功率谱密度（ＰＳＤ）函数的基本概念、公 式和应用基础上，重点讨论了光学元件表面低频和中高频空间频率ＰＳＤ对光场分布的影响， 并给出了强激光光学元件表面ＰＳＤ函数曲线的几个实测结果。This paper describes the conception and the applications of the power spectral density function in optical surface profile measurement. It includes power spectral density(PSD) standard in ISO10ll0-8 and its origin, the connection between the light intensity disturbing and PSD function from the surface figure and surface finish. At last the PSD function of the high power laser optical elements is discussed.

关 键 词：功率谱密度函数 表面轮廓测量 强激光 光学元件 

分 类 号：TH741.3[机械工程—光学工程]