纳米材料互连技术研究进展  

Advances in Nanomaterials Interconnect Technology

作　　者：张金鹏[1,2] 安兵[1,2] 王强翔[1,2] 张文斐[1,2] 吴懿平[1,2] 

机构地区：[1]华中科技大学材料学院,湖北武汉430074 [2]武汉光电国家实验室,湖北武汉430074

出　　处：《电子工艺技术》2012年第4期189-192,218,共5页Electronics Process Technology

基　　金：国家自然科学基金项目(项目编号:60976076)

摘　　要：纳米材料的互连技术是由纳米材料走向纳米器件的桥梁,是推动纳米材料大规模应用的必然基础之一。综述了近年来报道的可控的纳米材料焊接互连方法,包括焦耳热焊接、电子束焊接、光束焊接和原子力显微镜焊接,对其原理和特点进行了分析,并对此领域的发展趋势进行了展望。The nano-interconnect technology acts as a bridge to lead the nanomaterials into the nano-divices,and becomes one of the groundworks to promote nanomaterials in mass application.Review the research and development of controllable nano-welding interconnection methods in recent years including the Joule heat welding,electron-beam welding,optical welding and AFM welding.The principles and characteristics of these methods were analyzed,and the trend in this area is forecasted.

关 键 词：纳米互连 焦耳热焊接 电子束焊接 光焊接 原子力显微镜焊接 

分 类 号：TN60[电子电信—电路与系统]