利用表面磁光克尔效应监测Ni薄膜生长的物相转变  

Study on phase transformation of Ni films using surface magneto-optic Kerr effect

作　　者：石绍华[1,2] 欧阳雨[2] 李道勇[2] 曹伟然[2] 

机构地区：[1]曲阜师范大学激光研究所,山东曲阜273165 [2]临沂大学理学院,山东临沂276005

出　　处：《物理实验》2012年第8期30-33,共4页Physics Experimentation

摘　　要：利用磁控溅射方法制备了不同厚度和退火处理的Ni薄膜.表面磁光克尔效应研究表明:冷基底无退火处理的Ni薄膜为软磁性,退火处理的Ni薄膜为铁磁性质,且无退火处理的Ni金属膜磁性随膜厚的增加而增强.分析认为,冷基底条件下Ni膜是非晶态生长,且膜内存有大量缺陷,经退火处理的Ni膜发生了重融再生长,形成了大颗粒结晶,膜内晶粒内缺陷大量消失.The nickel films were prepared by magnetron sputtering. The surface magneto-optic Kerr effect （SMOKE） of the films indicated that the unannealed films showed the property of the soft magnetic materials whose magnetism could he enhanced with the increase of sample thickness, and on the otherwise the annealed films showed the property as ferromagnetic materials. The reasons of this phenomenon may be that the deposition process of the films prepared by magnetron sputtering was an amorphous growth process with a low temperature base and conditions. In contrast, the anneal opera- tion made the crystal particles of nickel films melt and re.row.

关 键 词：Ni薄膜 磁控溅射 表面磁光克尔效应 非晶态生长 重融再生 

分 类 号：O436.4[机械工程—光学工程]