基于MEMS镍平面微弹簧尺寸误差分析  

Analysis of dimension tolerance for MEMS Ni planar micro spring

作　　者：邵伟平[1] 张继桃[1] 郝永平[1] 渠元菊[1] 王威 谷双喜 

机构地区：[1]沈阳理工大学CAD/CAM技术研究与开发中心,辽宁沈阳110159 [2]国营第五二四厂,吉林吉林132021

出　　处：《机械设计》2012年第8期80-82,共3页Journal of Machine Design

基　　金：国家预研项目

摘　　要：对微机电系统(Micro-Electro-Mechanical System,MEMS)加工的S型微弹簧垂直方向弹性系数影响最大的参数是弹簧线宽b。鉴于此,特针对采用LIGA工艺加工出的两组不同弹簧的线宽进行了精密测量,分析计算出加工误差对弹性系数的影响大小,并对S型微弹簧的设计提出几点建议。For the S style micro spring machined by Micro-E- lectro-Mechanical Systems （MEMS）, its line width ＂b＂ is the pa- rameter having the biggest effect on its elastic coefficient in vertical direction. Because of this, precision measurement of the line width for two sets of different springs machined by applying LIGA technol- ogy has been carried out, the size of influence of machining error on spring coefficient has been analyzed and calculated, then offering some advices for S style spring design.

关 键 词：微机电系统 S型微弹簧 弹性系数 加工误差 

分 类 号：TH122[机械工程—机械设计及理论]