MEMS用新型微型超级电容器的制造及性能分析  

Fabrication of a novel micro-supercapacitor for MEMS and its performance analysis

作　　者：陈学坤[1] 王晓峰[1] 张高飞 阮勇[1] 尤政[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《高技术通讯》2012年第8期863-868,共6页Chinese High Technology Letters

基　　金：国家自然科学基金（50905096）资助项目.

摘　　要：采用微加工工艺为MEMS制作了一种基于电化学赝电容原理储能的微型能量存储器件——新型微型超级电容器。通过光刻、感应耦合等离子体刻蚀和溅射等MEMS微加工工艺制作了硅基3D微电极阵列，并在其表面用阴极电沉积法制备了氧化钌功能薄膜。采用循环伏安法和交流阻抗法研究了3D微电极的性能，系统比较了3D微电极与平面微电极的电化学性能，测试结果表明3D微电极的比电容达1．57F·cm^-2。基于三维微电极阵列阳极和钌钛金属氧化物阴极组装了微型超级电容器，恒流充放电测试结果表明该电容器的比容量达0．73F·cm^-2，比功率达0．50mW·cm^-2，比能量达0．36J·cm^-2。A new micro-supercapacitor, as a promising energy-storage device for MEMS, was developed. Si substrate 3 D microelectrode arrays were fabricated by MEMS technologies including Lithography, Inductively Coupled Plasma Etching （ICP） , and RF magnetron sputtering, and a RuO2 functional film was prepared on the surface of the arrays by cathodic deposition. The electrochemical performance of the 3D microelectrodes were investigated by Cyclic Vol- tammetry （CV） and electrochemical impedance spectroscopy （EIS）, and the results were compared with planar microelectrodes deeply. The experimental results show that the specific capacitance of 3D microelectrodes amounts to 1.57F·cm^-2 In addition, the micro-supercapacitor was also assembled with 3D microelectrodes. A maximum specific capacitance of O. 73F ·cm^-2, a maximum power density of 0.50mW·cm^-2 and a maximum energy density of 0.36J ·cm^-2 were obtained based on the results of galvanostatic charge/discharge measurement.

关 键 词：微机电系统(MEMS) 三维微电极阵列 微型超级电容器 氧化钌 赝电容 

分 类 号：TM53[电气工程—电器]