自适应系统在单频激光干涉仪上的应用研究  

Application Research of Self-adaptation System on Single-frequency Laser Interferometer

作　　者：黄雷[1] 马宏[1] 马钟焕[2] 尹子[2] 

机构地区：[1]长春理工大学,吉林长春130022 [2]吉林省计量科学研究院,吉林长春130022

出　　处：《计量学报》2012年第5期395-399,共5页Acta Metrologica Sinica

基　　金：吉林省质量技术监督局立项项目

摘　　要：通过对单频激光干涉仪焦平面上等倾干涉条纹的能量分析和环境因素带来的随机噪声分析，研制一种自适应系统。该系统采用了四阶累积量计算法、信号滤波和信号直流分量提取算法。实验结果表明，可有效处理噪声信号，提取信号直流分量，从而提高直流分量跟踪精度。将该系统安装在单频激光于涉仪上，在非实验室环境条件下其线性测长准确度可达0．9×10-6L，测量重复性为0．09μm。To analyze the equal inclination fringe on focal plane in single-frequency laser interferometer and random noise of environmental factors, a self-adaptation system was developed. The fourth-order cumulant method, signal filtering method and direct current component distilling method are adopted. The experimental results show that, the noise of the signal can be disposed by this system, so the direct current component can be distilled. Accordingly, high-precision tracking to the direct current component is achieved. By installing the self-adaptation system on single-frequency laser interfemmeter in operation environment,its linear measuring accuracy achieves 0.9×10-6L, and measurement reproducibility is 0. 09 μm.

关 键 词：计量学 自适应 单频激光干涉仪 直流分量 等倾干涉条纹能量 

分 类 号：TB92[一般工业技术—计量学]