基于eM-Plant的晶圆重入加工自动组合装置仿真  

eM-Plant Based Simulation of Cluster Tools with Wafer Reentrant Processes

作　　者：龚倩[1] 白丽平[1] 伍乃骐[1] 

机构地区：[1]广东工业大学机电工程学院,广东广州510006

出　　处：《机电工程技术》2012年第8期7-10,共4页Mechanical & Electrical Engineering Technology

基　　金：国家自然科学基金项目(编号:60574066)

摘　　要：原子层沉积加工是晶圆制造中典型的重入加工,在这个过程中,晶圆需要在同一个模块中被加工多次,这使得整个系统的调度变得很复杂。为此,基于eM-Plant系统仿真软件,建立了晶圆制造单臂自动组合设备的模型,通过该模型模拟了晶圆重入加工调度过程,最终获得系统加工的节拍,为以后研究晶圆重入加工提供了一个有效方法。Atomic layer deposition（ALD） is a typical revisiting process in wafer fabrication.In such processes,the wafers need to visit some processing modules a number of times,which makes the scheduling of overall system much complicated.So a model of single-arm cluster for semiconductor fabrication was developed by using eM-Plant.It is a new method based on simulation which can solve the problem of scheduling.With this system,the scheduling of wafer reentrant processes is simulated,and optimal cycle time of the overall system can be obtained.It is an effective method for researchers to study the scheduling of cluster tools with wafer reentrant.

关 键 词：晶圆制造 EM-PLANT 仿真 自动组合设备 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]