基体温度对中频脉冲非平衡磁控溅射技术沉积类金刚石薄膜结构与性能的影响  

Growth and Characterization of Sputtered Diamond-Like Carbon Films

作　　者：代海洋[1] 翟凤潇[1] 陈镇平[1] 展长勇[2] 

机构地区：[1]郑州轻工业学院技术物理系,郑州450002 [2]四川大学原子核科学技术研究所,成都610064

出　　处：《真空科学与技术学报》2012年第8期727-731,共5页Chinese Journal of Vacuum Science and Technology

基　　金：郑州轻工业学院博士科研基金资助项目(No.2010BSJJ030)

摘　　要：利用中频脉冲非平衡磁控溅射技术在不同的基体温度下制备了类金刚石(DLC)薄膜,采用Raman光谱、X射线光电子能谱(XPS)、纳米压痕测试仪、椭偏仪对所制备DLC薄膜的微观结构、机械性能、光学性能进行了分析。Raman光谱和XPS结果表明,当基体温度由50℃增加到100℃时,DLC薄膜中的sp3杂化键的含量随基体温度的升高而增加,当基体温度超过100℃时,DLC薄膜中的sp3杂化键的含量随基体温度的升高而减少。纳米压痕测试表明,DLC薄膜的纳米硬度随基体温度的增加先增加而后减小,基体温度为100℃时制备的薄膜的纳米硬度最大。椭偏仪测试表明,类金刚石薄膜的折射率同样随基体温度的增加先增加而后减小,基体温度为100℃时制备的薄膜的折射率最大。以上结果说明基体温度对DLC薄膜中的sp3杂化键的含量有很大的影响,DLC薄膜的纳米硬度、折射率随薄膜中的sp3杂化键的含量的变化而变化。The diamond-like carbon（DLC） films were deposited on glass substrates by mid frequency unbalanced magnetron sputtering.The influencing growth factors,such as the substrate temperature,sputtering power,and pressure,were evaluated.The microstructures and properties were characterized with X-ray photoelectron spectroscopy（XPS）,Raman spectroscopy,ellipsometry,and conventional surface probes.The results show that the substrate temperature strongly affects the bonding of carbon atoms.The sp3 fraction and the refractive index varied in an increase-decrease way with an increase of substrate temperature.As the temperature increased from 50℃ to 100℃,the sp^3 fraction slowly increased.However,as the temperature increased from 100℃ to 200℃,the sp^3 fraction decreased.At 100℃,the DLC film has the highest surface hardness and peak refractive index.We suggest that the surface hardness and refractive index significantly may depend on the sp^3 fraction.

关 键 词：类金刚石薄膜 基体温度 中频脉冲非平衡磁控溅射技术 微观结构 性能 

分 类 号：O484.1[理学—固体物理]