立式靶丸AFM表面轮廓仪系统精度测试  

Measure Precision Analysis of Capsule Vertical-AFM Surface Profiler System

作　　者：赵学森[1,2] 高党忠[2] 马小军[2] 孟婕[2] 唐永建[2] 张林[2] 孙涛[1] 

机构地区：[1]哈尔滨工业大学精密工程研究所,黑龙江哈尔滨150001 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《原子能科学技术》2012年第8期1014-1018,共5页Atomic Energy Science and Technology

基　　金：国家自然科学基金资助项目(51005061);教育部新教师博士点基金资助项目(20092302120006)

摘　　要：研制了立式轴系结构靶丸AFM表面轮廓仪,对测量装置的精度进行了系统的测试。针对影响测量结果的不确定性因素,分别从气浮轴系回转误差、系统静态噪声误差以及综合测量误差几个角度开展实验研究。采用标准球及两步回转误差分离法获取了气浮轴系系统误差数据,在实际测量时作为系统误差进行消除。综合测量实验证明,该系统的测量噪声峰谷极差约22nm,RMS为5.2nm。A capsule surface profiler system based on vertical spindle structure and atomic force microscope（AFM） was developed,and its systematic measurement tests were carried out.In order to evaluate the measurement uncertainty,the experimental studies mainly included the air-bearing spindle rotation run out error test,the system static noise test,and the comprehensive test.The rotary precision of air bearing was tested and the error curve of the spindle was obtained with a standard ball and two-step separation method.Further,this error curve was eliminated as in a systematic error.Comprehensive measurement tests of the system prove that the noise peak value of this system is about 22 nm and its RMS is about 5.2 nm during the measurement process.

关 键 词：ICF靶丸 AFM 表面轮廓仪 立式轴系结构 测量精度 

分 类 号：TH744.3[机械工程—光学工程]