钯铬合金电阻氢气传感器研究  

Study of Pd/Cr Alloy Electrical Resistance Hydrogen Sensor

作　　者：肖友文[1] 谢贵久[1] 王玉明[1] 谢利华[1] 曾固[2] 钱力[2] 宋祖殷 

机构地区：[1]中国电子科技集团公司第四十八研究所,长沙410111 [2]航天医学工程研究所,北京100094 [3]空军驻湖南军代室,长沙410110

出　　处：《载人航天》2012年第5期78-81,96,共5页Manned Spaceflight

基　　金：载人航天领域预先研究项目(02010101)

摘　　要：采用钯铬合金作为氢敏材料，利用离子柬技术制备薄膜式氢气传感器。测试了传感器对0-4%浓度范围氢气的敏感特性，结果显示，传感器对0-4％氢气浓度具有良好的线性输出特性，并表现出较高的响应灵敏度和较好的响应重复性，传感器响应信号相对强度随着温度升高减小，传感器响应时间随着温度升高而减小。A thin film hydrogen sensor using Pd/Cr alloy as sensing materials is prepared with ion beam technology. Testing results indicate that this hydrogen sensor has a pretty good linear output performance to a 0-4% density of hydrogen detection, and demonstrates a high responsiveness and repeatability. The strength of the responsive signal of the sensor decreases while the temperature increases, and its responsive time shortened as the temperature increases.

关 键 词：薄膜 钯铬 氢气传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]