阵列式MEMS仿生矢量振动传感器研究  

Research on aligned array MEMS bionic vector vibration sensor

作　　者：刘林仙[1,2] 张国军[1,2] 许姣[1,2] 张慧[1,2] 李振[1,2] 张文栋[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 [2]中北大学电子测试技术重点实验室,山西太原030051

出　　处：《传感器与微系统》2012年第9期39-41,45,共4页Transducer and Microsystem Technologies

基　　金：国家"863"计划资助项目(2011AA040404)

摘　　要：针对在同一个物理测试过程中,往往会遇到很多所需测量振动信号的大小和频率在大范围内变化,而一个振动传感器很难满足测试要求的情况,提出了一种四单元集成阵列式仿生矢量振动传感器,4个微结构传感器量程分别为:10,100,500,1 000 gn。在分析敏感结构数学模型的基础上,用ANSYS软件对阵列敏感元件进行仿真,最后对加工好的传感器进行了相关的测试。测试结果表明:该阵列式振动传感器在二维方向的灵敏度高,线性度好,输出稳定性好。量程为100 gn传感器x向灵敏度为2.6134 mV/gn,线性度为0.99991,y向灵敏度为2.5563 mV/gn,线性度为0.99968。Aiming at the issues that in the process of a physical measurement procedure, value and frequency of many vibration signals change in a wide range, but one single transducer can hardly satisfy the testing requirement, a kind of four units integrated aligned array MEMS bionic vector vibration sensor is proposed. This aligned array vibration sensor contains four micro-structure sensors, whose testing ranges are 10,100,500, 1 000 gn. On the basis of the mathematical model analysis on sensitive structure, the array sensing unit is simulated by ANSYS. The relative test results are carried out. The measurement results show that both the two direction of the aligned array vibration sensor have high sensitivity, good linearity and good output stability. The sensitivity of the x direction is 2. 613 4 mV/gn and y is 2. 556 3 mV/gn, the linearity of x direction is 0. 999 91and y is 0. 999 68.

关 键 词：微机电系统 阵列式 仿生 振动传感器 

分 类 号：TB565.1[交通运输工程—水声工程]