脉冲激光冲击处理下电镀铜薄膜疲劳特性分析  

STUDY ON FATIGUE PROPERTY FOR ELECTROPLATED COPPER THIN FILM BY PULSED LASER SHOCK PEENING

作　　者：刘小冬[1] 尚德广[1] 柳会[1] 徐明辉[1] 徐姣[1] 刘天亮[1] 

机构地区：[1]北京工业大学机械工程与应用电子技术学院,北京100124

出　　处：《机械强度》2012年第5期751-756,共6页Journal of Mechanical Strength

基　　金：国家自然科学基金重大国际合作项目(51010006);国家自然科学基金(50975005);北京市自然科学基金(3092003);北京市教委科技计划重点项目(KZ201010005003)资助~~

摘　　要：采用20 W光纤激光器对电镀铜薄膜双侧U形缺口试件进行激光冲击处理。试件采用准LIGA(lithographie,galvanformung,abformung)工艺电镀方法制备。在室温条件下,通过控制载荷对激光冲击处理前后的试件进行脉动拉伸疲劳试验,研究分析其机械疲劳特性变化的机理。通过对比冲击情况下同一周次的疲劳滞后环面积,发现激光束冲击到缺口边缘内侧的试件疲劳性能明显提高。研究表明,在各自一定的名义应力范围内,未经冲击处理强化试件的损伤要比激光冲击处理强化后试件的损伤大。激光冲击处理方式可使材料的疲劳性能增强,从而使疲劳寿命延长。Eleetroplated copper film with double U shape notches was treated by laser shock peening （ LSP）. The specimen was fabricated with LIGA （lithographic, galvanformung, abformung） -like electroplating technology. The changes of mechanical and fatigue properties of specimens before and after LSP were studied under pulsating cyclic loading. The areas of hysteresis loop of different conditions at the same cycle are compared, and it shows that when the inner of edge of specimen is peened by the laser beams, the fatigue capability of the specimen is obviously improved. The data of experiment shows that it should be causing more damage in the specimens by non-LSP then the ones by LSP. The way of LSP can lessened damage of material,and the fatigue lives of the specimens are also improved.

关 键 词：电镀铜薄膜 激光冲击处理 疲劳寿命 滞后环 微机械电子系统 

分 类 号：U416.217[交通运输工程—道路与铁道工程]