基于激光辐照的铜薄膜疲劳损伤修复最佳参数研究  

STUDY ON OPTIMAL PARAMETER OF FATIGUE DAMAGE REPAIRING FOR COPPER FILM BASED ON LASER IRRADIATION

作　　者：徐明辉[1] 尚德广[1] 柳会[1] 能昌刚[1] 

机构地区：[1]北京工业大学机械工程与应用电子技术学院,北京100124

出　　处：《机械强度》2012年第5期757-760,共4页Journal of Mechanical Strength

基　　金：国家自然科学基金(50975005;51010006);北京自然科学基金(3092003);北京市教育委员会科技计划重点项目科学基金(KZ201010005003)资助项目~~

摘　　要：首先对无损伤铜薄膜试件进行疲劳试验,测得S—N曲线。然后预制疲劳损伤程度为40%的铜薄膜试件,利用准分子激光器对其进行损伤修复。通过对比激光辐照处理前后试件的剩余寿命,可以得到如下结论,对于损伤程度为40%的25μm铜薄膜试件,最佳修复能量度约为5×103J/m2,最佳脉冲个数约为30;能量密度对于修复效果的影响程度强于脉冲个数的影响程度;运用激光辐照进行损伤修复是切实可行的。Fatigue test was carried out to obtain S--N curve for undamaged cooper film first. Then specimen with a damage degree of 40% was prepared. Excimer laser was finally used to repair the fatigue damage. By comparing data pre- and post- processing, the main results are as follows： The best energy density is about 5×10^3J/m^2 and the best pulse number is about 30. The influence degree of energy density on repairing effect was stronger than that of pulse number. Laser irradiation processing is a feasible way to damage repair.

关 键 词：激光辐照 铜薄膜 损伤修复 

分 类 号：TB302.3[一般工业技术—材料科学与工程] TG146.11[金属学及工艺—金属材料]