表面层型半导体陶瓷电容器的开发及产业化  

Development and Commercial Production of Semiconductor Ceramic Capacitor of Surface Layer Type

作　　者：王振平 赵俊斌 李勇 章士瀛 

机构地区：[1]东莞宏明南方电子陶瓷有限公司,东莞523077

出　　处：《材料导报》2000年第9期66-68,共3页Materials Reports

摘　　要：表面层型半导体陶瓷电容器的开发成功,是我国新型元件领域中的一项高新技木及其产业化的突破。重点介绍了表面层型半导体陶瓷电容器的基本结构和原理。本项目开发创新成果:隧道式气氛烧结组合炉,还原气氛的获取,半导化及再氧化技术,工程中设计参数及氧化层厚度观察及量测技术等。The successful introduction of semiconductor ceramic capacitor of surface layer is a break throughachievement in the field of new type electronic components. This paper describes the basic structure and operating principles of semiconductor ceramic capacitor and the achievements obtained by the project .including combination tun nel furance with an H2 + N3 atmosphere; the way of getting get H2+ N2;the technology of reduction and re-oxulation; design parameter for engineering .and microstructural obsevatlon etc

关 键 词：表面层型 结构 原理 半导体陶瓷电容器 产业化 

分 类 号：TM534.1[电气工程—电器]