基于Minitab的MEMS测量系统偏倚及线性研究  

Study on Bias and Linearity Analysis of MEMS Measurement System Based on Minitab

作　　者：于金伟[1] 

机构地区：[1]潍坊学院,山东潍坊261061

出　　处：《实验室研究与探索》2012年第1期24-28,共5页Research and Exploration In Laboratory

基　　金：国家星火计划(2011GA740047);山东省星火计划项目(2010XH06025);山东省国际科技合作计划项目(201013)

摘　　要：对测量误差的大小及能否接受的判断需要进行测量系统分析,从而可以减少因仪器设备引起的误差,并得到测试数据中所隐含的信息。介绍了进行测量系统偏倚及线性分析的概念及方法,在消音室用B&K测试仪对MEMS微传声器频响、灵敏度测得了参考值并使用在线测量系统对标准样品测得了相关数据,运用Minitab软件对测量系统在0.10、1.00、3.15和8.00 kHz等不同频点的偏倚及线性进行了分析,提出了复合测量系统的概念,并对此进行了有效的分析。根据研究结果,找到了运用整体偏倚值对测量系统进行修正的方法,并用Minitab对改善后的测量系统进行了预测,应用于生产实际后,大大提高了MEMS微传声器测量系统测试数据的可靠性。The measurement error and whether the error can be accepted or not should be analyzed by the measurement system.In this paper,the conception and method of bias and linearity analysis of measurement system are introduced.The reference value for MEMS microphone frequency response and sensitivity was measured by using BK measuring equipment and the relative data for the standard sample was measured by using online measurement system in anechoic chamber.The Minitab software was used to analyze the bias and linearity of measurement system at 0.10,1.00,3.15,8.00 kHz.The conception of complex the measurement system was put forward and was effectively analyzed.Based on the result,the method of using the whole bias to correct measurement system was discovered,and the reformed measurement system was forecast by using Minitab.When used in product practice it greatly enhances the reliability of the data of MEMS microphone measurement system.

关 键 词：Minitab MEMS 复合测量系统 测试数据 偏倚 线性分析 

分 类 号：TN641.2[电子电信—电路与系统]