一种新型变谐式微型压力传感器的结构设计  

Design of the New Micro Resonant Pressure Sensor

作　　者：王倩 卫鹏波 任线妮 

机构地区：[1]陕西省农业机械研究所,陕西咸阳712000 [2]西安瑞佳测量仪器有限公司,陕西西安710065

出　　处：《科技视界》2012年第26期296-298,共3页Science & Technology Vision

摘　　要：本文采用MEMS技术设计了一种新型变谐式微型压力传感器,对其变谐原理、驱动理论及检测理论等进行了深入的研究。当对制作出的样件施加不同压强的气体时,记录测量数据;测试结果表明：该微型压力传感器的重复性和迟滞性保持在0.1%左右,基本满足工业领域的测量标准,对其在工业领域的应用提供了重要的研究价值。In this paper, a new micro resonant pressure sensor was investigated. Firstly, it was presented that the principle of the variable resonant frequency and the method of comb-driving. Then the detection theory was deeply researched. Finally, the measure- ment results was recorded when the pressure of the input air was varied. The experimental results show that the repeatability and the hysteresis was about 0.1% and basically meet the industrial demand. Therefore, the research of this paper has significant reference value to the application of the resonant pressure sensor.

关 键 词：MEMS 谐振 微型压力传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]