多晶硅制备中节能降耗技术的研究  

Study on energy-saving and consumption-reducing technologies in polycrystalline silicon preparation

作　　者：陈其国[1] 钟真武[1] 高建[2] 于伟华[1] 陈文龙[1] 江宏富[1] 

机构地区：[1]江苏中能硅业科技发展有限公司,江苏徐州221004 [2]南京大学固体微结构物理国家重点实验室,江苏南京210093

出　　处：《氯碱工业》2012年第9期28-30,共3页Chlor-Alkali Industry

摘　　要：探讨改良西门子法多晶硅工艺中副产物的综合利用、优化沉积工艺、优化与开发新型高效节能大型还原炉和新型高反射涂层等技术对多晶硅生产中节能降耗的影响,指出将目前已普遍使用和发展成熟的过程强化技术应用于多晶硅制备,可进一步降低多晶硅的制备成本。Effects of some technologies on energy saving and consumption reducing in modified Siemens process for polycrystalline silicon preparation were discussed. The discussed technologies included the comprehensive utilization of by-products, the optimization of deposition process, the optimization and development of novel high-efficiency energy-saving reduction furnace of large scale and novel highly-reflective coating. It was indicated that if the process intensification technologies that were commonly used and matured at present were applied to preparation of polycrystalline silicon, its preparation cost could be reduced further.

关 键 词：多晶硅 改良西门子法 节能降耗 

分 类 号：TQ127.2[化学工程—无机化工]