阳极真空弧基本现象及理论分析  

Preliminary Analysis of Basic Phenomenon and Mechanism in the Anodic Vacuum Arc

作　　者：王瑞光[1] 贺秉庚[2] 青心[1] 张志友[1] 

机构地区：[1]烟台大学物理系,山东烟台264635 [2]烟台大学计算机学院,山东烟台264635

出　　处：《烟台大学学报（自然科学与工程版）》2000年第3期185-188,共4页Journal of Yantai University(Natural Science and Engineering Edition)

摘　　要：依据阳极真空弧实验事实叙述了阳极弧的形成过程中所观察的基本现象 .应用等离子体输运理论和Boxman Goldsmith模型 ,对这一放电过程进行了分析 .通过弧等离子体特性的测量 。The paper discribes the basic phenomena in the anodic vaccum arc producing process according as what has taken place in the experiment. The mechanism of plasma transport is combined with Boxman Goldsmith model to explain the arc discharge. Furthermore, the energy of the nurrals and the charge carries at the substrate is roughly evaluated on the basis of experimental diagnosis for expanding plasma.

关 键 词：阳极真空弧 等离子体 阳极斑 真空电弧沉积 

分 类 号：TG174.44[金属学及工艺—金属表面处理] O484.1[金属学及工艺—金属学]