固着磨料工艺加工碳化硅反射镜表面质量研究  

Evaluation of the RB-SiC mirror surface fabricated with the fixed abrasive technology

作　　者：王旭[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术实验室,吉林长春130033

出　　处：《红外与激光工程》2012年第9期2474-2479,共6页Infrared and Laser Engineering

基　　金：国家973项目(2011CB01320005)

摘　　要：主要研究内容是对固着磨料工艺加工的碳化硅反射镜光学表面进行高频频段的评价。从微观模型入手对表面粗糙度进行了计算机仿真,并将模拟结果与实测结果进行了对比,针对使用不同规格的丸片加工碳化硅反射镜,其表面粗糙度的结果实验值与理论值的偏差比分别为5.97%,3.19%,3.59%,37.37%,并详细分析了出现偏差的可能原因。最后使用分形理论分析了固着磨料工艺加工后获得的光学表面,由此得出固着磨料工艺很容易快速获得较为光滑的光学表面,非常适合于快速表面成形及在较大面形误差的情况下获得较低的表面粗糙度。RB-SiC mirror surface quality fabricated with different types of fixed abrasive pellets was evaluated.The 2D surface roughness of the mirror was simulated and experimented.The error between the simulation and the experiment were 5.97%,3.19%,3.59%,37.37% respectively.Emerging reason of the error was analyzed in detail after the comparison.The fractal theory was applied on the analysis of the optical mirror surface fabricated with the fixed abrasive technology.The analysis result shows that good surface quality of the RB-SiC mirror can be obtained quickly polished with the fixed abrasive technology.

关 键 词：固着磨料 碳化硅 非球面 高频 分形 

分 类 号：TN304.05[电子电信—物理电子学] TH703[机械工程—仪器科学与技术]