微声薄膜耦合谐振滤波器有限元建模与仿真  

Finite Element Modeling and Simulations of Film Bulk Acoustic Wave Coupling Resonator Filters

作　　者：杜波[1] 马晋毅[1] 江洪敏[1] 杨靖[1] 徐阳[1] 

机构地区：[1]中国电子科技集团公司第26研究所,重庆400060

出　　处：《压电与声光》2012年第5期672-675,共4页Piezoelectrics & Acoustooptics

摘　　要：针对一维等效电路仿真模型不能对滤波器振动模式进行仿真的局限性,建立了微声薄膜耦合谐振滤波器二维和三维的有限元模型,仿真分析了滤波器在对称谐振频率和反对称谐振频率下的振动模式,并通过频率响应分析得到了滤波器的S参数。仿真结果表明,采用有限元分析法可实现微声薄膜耦合谐振滤波器几何参数以及电极结构的优化设计。1D equivalent circuit model can＇t be used to simulate the vibration modes of filter.So,2D and 3D FEM models of filters were built.Then,the vibration modes at symmetry and dissymmetry frequencies were analyzed.In the end,the S parameters of filter were computed by frequency response analysis.The results show that FEM can be used to design the geometry parameters and electrode structure of CRF.

关 键 词：微声薄膜 耦合谐振滤波器 有限元 

分 类 号：TN65[电子电信—电路与系统]