ZnO纳米颗粒薄膜的制备及其光学特性  

Fabrication and Optical Properties of ZnO Nanoparticle Thin Films

作　　者：袁兆林[1] 于军胜[1] 李青[1] 蒋亚东[1] 

机构地区：[1]电子科技大学光电信息学院电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《压电与声光》2012年第5期746-748,752,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(60736005和61177032);新研究团队资助项目(61021061);教育部博士点基金资助项目(20090185110020);中央高校基本科研业务费专项基金资助项目(ZYGX2010Z004)

摘　　要：采用化学回流法制备了3种不同粒径的ZnO纳米颗粒,然后旋涂在ITO玻璃衬底上,形成样品a、b和c 3种ZnO纳米颗粒薄膜。场发射扫描电子显微镜(FESEM)结果显示,3种样品晶粒都呈颗粒形状,形成的薄膜较平整,平均晶粒尺寸分别为5nm、25nm和40nm。X线衍射(XRD)结果表明,ZnO纳米颗粒为多晶六方晶系纤锌矿结构。样品a、b在可见光区有很少的光吸收,在紫外光区有很强的吸收,而由于纳米颗粒的直径较大,样品c在紫外和可见光区都存在很强的吸收。室温下的光致发光谱表明,样品a有一个近带边(NBE)紫外发射峰和蓝光发射峰,样品b、c出现一很宽的深能级缺陷相关的可见光发光带,这说明3种薄膜都存在大量的本征缺陷。ZnO nanoparticles with three different diameters were synthesized using a chemical refluxing route,which were then spin-coated on indium tin oxide coated glass substrates.Three ZnO nanoparticle thin films denoted as samples a,b and c was obtained.The results of FESEM images showed that the crystal grains in all thin films were approximately particle shape with an average size of 5 nm,25 nm and 40 nm,respectively,and all thin films were smooth.The XRD results indicated that ZnO nanoparticles displayed a hexagonal wurtzite structure.Samples a and b revealed weak absorption in the visible light region and strong absorption in the ultraviolet region,while the sample c both showed strong absorption in the visible and ultraviolet region,which was contributed to the ZnO nanoparticles with large diameter in the sample.Photoluminescence spectra at room temperature displayed that both a near band edge（NBE） ultraviolet photoluminescence peak and a blue peak were observed in sample a,both samples b and c exhibited a defect related deep level emission band.This was due to a large number of intrinsic defects in three thin films.

关 键 词：ZnO纳米颗粒薄膜 晶体结构 吸收光谱 光致发光谱 本征缺陷 

分 类 号：O484.4[理学—固体物理]