ZrCoRE吸气薄膜的膜层结构与性能研究  

Layer Structure and Properties of ZrCoRE Getter Thin Films

作　　者：卜继国[1] 毛昌辉[1] 张艳[1] 尉秀英[1] 杜军[1] 

机构地区：[1]北京有色金属研究总院先进电子材料研究所,北京100088

出　　处：《稀有金属》2012年第5期757-761,共5页Chinese Journal of Rare Metals

基　　金：北京有色金属研究总院创新技术基金资助项目(200952702)

摘　　要：为了研究膜层结构对非蒸散型吸气薄膜性能的影响,运用射频磁控溅射法(RF magnetron sputtering)制备了ZrCoRE单层膜和双层膜,其中单层膜只含主体层,双层膜含有主体层和附着层。采用扫描电子显微镜(SEM)、原子力显微镜(AFM)、X射线衍射法(XRD)表征了薄膜的形貌和结构,利用ASTM F798-97"动态法"测试了薄膜的吸气性能。结果表明,ZrCoRE薄膜的主体层在较高沉积压强(4 Pa)下受到原子阴影效应与沉积原子低迁移率的作用而形成柱状组织,附着层在较低沉积压强下(0.2 Pa)由于沉积原子迁移率高而形成致密组织,附着层的存在使主体层柱状组织实现连续生长;主体层表面为20 nm的颗粒无序堆积态,形成了大量的表/界面缺陷;通过高频感应在300℃下激活30 min,在2.7×10-4Pa的H2压强下,薄膜的室温吸气速率在1～100 cm3·s-·1cm-2范围内变化;双层膜吸气速率是单层膜的10倍,3 h的吸气量达80 Pa·cm3·cm-2;吸气薄膜的大活性比表面积和高扩散速率,使其单位质量吸气量达104Pa·cm3·g-1量级以上,高于块体吸气剂的103Pa·cm3·g-1量级,附着层的存在提高了主体层的吸气性能。In order to study the effect of layer structures on non-evaporable thin film getters performance,ZrCoRE monolayer and bi-layer getter films were prepared by RF magnetron sputtering.The monolayer film consisted of the single matrix layer,while the bi-layer film consisted of both matrix layer and sub-layer.Morphologies and structures were analyzed by scanning electron microscope（SEM）,atomic force microscope（AFM） and X-ray diffraction（XRD）.ASTM F798-97 ＂dynamic test＂ was used to measure the sorption property.The results showed that the matrix layer developed as columnar-like structure owing to the atomic shadowing effect and reduced mobility of deposited species in high deposition pressure（4 Pa）.While the sub-layer,facilitating the continuous development of matrix columnar structure,developed dense structures as the high mobility of deposited species in low deposition pressure（0.2 Pa）.After activation at 300 ℃ for 30 min by high frequency induction,thin film getters exhibited a sorption speed among 1～100 cm3 · s-1 · cm-2 under the hydrogen pressure of 2.7×10-4 Pa at room temperature.The sorption speed of the bi-layer film was 10 times of the monolayer film contributing to a sorption quantity over 80 Pa · cm3 · cm-2 in 3 h.The huge specific active area and fast diffusion speed endowed thin film getters with sorption capacity over 104 Pa · cm3 · g-1 magnitude,higher than 103 Pa · cm3 · g-1 of the bulk getter.Sub-layer existence increased the sorption property of matrix layer.

关 键 词：ZrCoRE 非蒸散型吸气薄膜 磁控溅射法 膜层结构 吸气性能 

分 类 号：TB43[一般工业技术]