基于机械放大式机构的新型纳米位移传感器设计  

Design of a Novel Nanoscale Displacement Sensor Based on Mechanical Magnification Mechanism

作　　者：李正伟[1,2] 余永[3] 吴倩[1,2] 葛运建[1] 

机构地区：[1]中国科学院合肥智能机械研究所,安徽合肥230031 [2]中国科学技术大学自动化系,安徽合肥230026 [3]鹿儿岛大学科学工程研究院

出　　处：《仪表技术》2012年第11期51-54,共4页Instrumentation Technology

基　　金：国家自然科学基金资助项目(6063540)

摘　　要：为了能有效地检测PZT驱动器纳米级的驱动位移,文章提出一种采用基于柔性铰链的多级杠杆放大原理的新型纳米位移传感器。与前三代纳米位移传感器相比,新型传感器采用差动结构以及圆筒状的外形,传感器的这种独特结构赋予其较大的机械放大比;同时,建立了其理想数学模型并计算了机械放大比。为了证明传感器的有效性,对其进行了有限元仿真分析。分析结果表明新型纳米位移传感器具有较大的应变输出,且其位移分辨率将小于3 nm。In order to effectively detect the nanoscale displacement of PZT actuator , this paper presents a novel nanoscale displacement sensor, which adopts multi-stage lever amplification mechanism based on flexure hinges. Com- pared with our previous displacement sensors, the designed new sensor possesses differential structure and cylindrical shape. This special kind of configuration endows it with a large mechanical magnification ratio. In addition, its ideal mathematical model is built and its amplification ratio is calculated. To verify the effectiveness of the new sensor, FEM simulation is performed. The simulation results show that the elastic body of the new sensor has large strain output and the new sensor is expected to have a high resolution of less than 3 nm.

关 键 词：纳米位移传感器 柔性铰链 圆柱状 差动结构 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]