区熔单晶生长过程中高频线圈形变的原因分析及理论计算  

High-frequency Coil Deformation Zone Melting Crystal Growth Process Analysis and Theoretical Calculation

作　　者：刘洪[1] 

机构地区：[1]中国电子科技集团公司第四十六研究所,天津300220

出　　处：《电子工业专用设备》2012年第10期40-42,共3页Equipment for Electronic Products Manufacturing

摘　　要：主要针对高频线圈于单晶生长过程中,在高频电流及棒体的高温作用下,产生的附加扭矩,改变线圈的设计外形,进行了原因研究、理论计算,并对单晶生长的影响进行了分析。通过采取适当的措施,降低由于线圈的形变对单晶的影响,提高单晶的成晶率。Change the shape of the coil design for high-frequency coil in the crystal growth process, high-frequency current and the high temperature of the rods, resulting in additional torque, why study the theoretical calculations, and crystal growth the impact analysis. Take appropriate measures to reduce the coil deformation of single crystals, to improve the yield of single crystal.

关 键 词：高频线圈 附加扭矩 区熔单晶 

分 类 号：TN304.053[电子电信—物理电子学]