采用电子束探针测试(EBT)的IC单元设计验证技术  

The IC Unit Design Verification with the E - beam Probe Station

作　　者：焦慧芳[1] 于宗光[2] 

机构地区：[1]信息产业部电子第五研究所,广州510610 [2]信息产业部无锡微电子科研中心,无锡214035

出　　处：《微电子技术》2000年第4期6-10,共5页Microelectronic Technology

基　　金：国防重点实验室(电子元器件可靠性物理及应用技术)资助

摘　　要：本文用电子束探针测试技术对ＩＣ单元电路进行了设计验证，包括功能验证和延迟参数的验证。快速准确地完成了电路内部的故障定位，完成了输入、输出的延迟测量及内部数门的延迟测量，测试结果准确可信。这一技术尝试，为集成电路的设计验证开辟了新的领域。This paper presents the IC unit design verification with the E - beam probe test- ing technique, which includes the function verification and the delay parameter verification With the E - beam probe station we located the defective area into the chip and tested the delay characterization between the input and output or some gates as well. The testing results are reliable. By using this new technique, some new area of IC design verification is opened.

关 键 词：电子束探针 单元设计 集成电路 

分 类 号：TN402[电子电信—微电子学与固体电子学]