数值分析电诱导流变成型技术外部因素的影响  

Influences of External Factors on the Electrically Induced Patterning Technique by Numerical Simulation

作　　者：田洪淼[1] 邵金友[1] 丁玉成[1] 李欣[1] 李祥明[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710049

出　　处：《微纳电子技术》2012年第11期736-742,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金重大研究计划重点支持项目(90923040);国家重点基础研究发展计划(973计划)资助项目(2009CB724202);中央高校基本科研业务费资助项目(xjj20100145)

摘　　要：电场诱导聚合物流变成型作为一种新型的利用外部电场实现微纳米复型的技术得到越来越多的关注。为了深入理解复型本质与影响因素,提出了电流体动力学(EHD)理论与动网格方法耦合的模型,从数值模拟角度研究了电场诱导聚合物流变成型过程中电场分布与诱导结构之间的关系,仿真分析了在此过程中各外部因素(电压、空气间隙与膜厚)对复型结构的影响。仿真结果表明,初始时刻聚合物薄膜表面的电场分布在复型过程中起决定性作用;同时,合理地调节施加电压,模板与聚合物薄膜间的空气间隙以及聚合物薄膜厚度都可以有效提高复型结构的质量。As a new approach to realize micro-or nano-structures using external electric field,the electrically induced patterning technique attracts more considerable attention.In order to deeply understand the forming mechanism and influencing factors,the numerical simulations were performed to research the relationship between the electrical distribution and formed structures,and analyze the influences of external factors（voltage,air gap and polymer thickness）,based on a proposed model coupling electrohydrodynamic（EHD） theory and dynamic grid technology.The simulation results show that the electrical distribution at the initial stage of the induced process is critical to determine the duplicated patterns.In addition,a reasonable voltage,an optimized air gap between the template and the polymer film,and an appropriate polymer thickness can effectively improve the quality of the formed structures.

关 键 词：电场诱导聚合物流变成型技术 电流体动力学 动网格技术 微纳结构 数值仿真 

分 类 号：TH703[机械工程—仪器科学与技术] TB712[机械工程—精密仪器及机械]