MEMS加速度计误差的高精度标定方法  

High-Precision Calibration Method for the Error of MEMS Accelerometers

作　　者：王小春[1] 李荣冰[1] 杭义军[1] 孙永荣[1] 

机构地区：[1]南京航空航天大学导航研究中心,南京210016

出　　处：《微纳电子技术》2012年第11期743-748,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(91016019);航空科学基金资助项目(20100852010)

摘　　要：针对微小型惯性测量单元(MIMU)工程应用的实际条件,设计了MEMS加速度计组安装误差与温度漂移误差的两步解耦标定方法。该标定方法基于MIMU结构封装确定、三轴加速度计之间安装关系固定、非正交因数稳定不随环境温度变化的特点,在常温下进行一次安装标定非正交误差,在全温范围内标定温度漂移误差。实验结果表明,该标定方法校正了加速度计的温度漂移误差和非正交误差,在全温范围内加速度计的使用精度提高了一个数量级,且该模型具有良好的重复性,便于工程实现。According to the actual condition of the engineering applications of the micro inertia[ measurement unit （MIMU）, a two-step decoupling calibration method for the installation error and temperature drift error o{ MEMS acceletometer groups was designed. Based on the fixed structure package of the MIMU, the fixed install relationship among three accelerometers and the stability of non-orthogonal factors with the ambient temperature change, the non-orthogonal error through one-time installation at room temperature and the temperature drift error in the en- tire temperature range were calibrated by the calibration method. The test results show that the calibration method corrects the temperature drift error and non-orthogonal error of the MEMS ac- celerometers, and improves the accuracy in the entire temperature range by one order of magni- tude. The model is highly repeatable and easy to realize the engineering.

关 键 词：微型惯性测量单元(MIMU) MEMS加速度计 误差模型 六位置标定 温度补偿 

分 类 号：TH703[机械工程—仪器科学与技术]