一种小型在线非接触球面干涉仪系统设计  

Miniaturization noncontact online testing of sphericity interferometer system

作　　者：林健[1] 王敏[1] 韩振华[1] 卓金寨[1] 

机构地区：[1]福建师范大学物理与光电信息科技学院,医学光电科学与技术教育部重点实验室,光子技术福建省重点实验室,福建福州350007

出　　处：《应用光学》2012年第6期1053-1057,共5页Journal of Applied Optics

基　　金：福建省科技计划重点项目(2009H0020)

摘　　要：为了实现车间球面镜片的半径偏差的在线无损检测,基于激光检测技术,提出了一种无需精密导轨的小型球面干涉仪系统的设计方案,并对整个系统的检测原理进行了分析。通过Zemax软件模拟的分析验证,该系统不仅可以测出球面面形的像散偏差和局部偏差,而且还可以快速测出球面镜的半径偏差,其演算测得的曲率半径精度优于0.01%。与目前已有的球面干涉仪相比较,具有系统结构紧凑、无精密导轨、操作效率高和低成本的特点,特别适用于车间的在线非接触检测。With the aim to measure the radius of curvature deviation of spherical lens online in workshop, based on the laser testing technique, a solution of miniaturization sphericity inter- ferometer system without precision guide was proposed, and the principle of the system was analyzed. After the analysis by Zemax simulation, the system could get the astigmatic and lo- cal deviation of lens, and measure the radius of curvature deviation fast. The results show that the precision of radius of curvature deviation is better than 0.01%. Compared with the existing sphericity interferometers, the new system workshop, and has advantages of compact is particularly fit for noncontact online testing in structure, no precision guide, high efficiency and low costs.

关 键 词：干涉仪 半径偏差 在线检测 小型化 

分 类 号：TN247[电子电信—物理电子学] TH744.3[机械工程—光学工程]