316L不锈钢基体上反应溅射添加YO_x粘接层的Y_2O_3/Er_2O_3复合涂层的研究  

Reactive sputtering deposition of Y_2O_3/Er_2O_3 composite coatings with YO_x adhesion layer on 316L stainless steels

作　　者：刘军[1] 吕维玲[1] 曹江利[1] 

机构地区：[1]北京科技大学新材料技术研究院,北京100083

出　　处：《真空》2012年第6期35-38,共4页Vacuum

基　　金：科技部ITER计划专项2009年度国内配套研究课题<阻氚渗透涂层技术研究>[2009GB109005]资助

摘　　要：为了研究添加粘接层对复合涂层的影响,采用脉冲反应溅射在316L不锈钢基体上制备了调制周期为700 nm左右(5层)的Y2O3/Er2O3复合涂层,通过调整氧氩比制备了不饱和氧化钇(YOx,x<1.5)作为粘接层,研究了添加粘接层对复合涂层相组成、组织形貌以及涂层与基底结合情况的影响。X射线衍射(XRD)、扫描电子显微镜(SEM)、结合力及纳米硬度分析结果表明,当氧分压为0.036 Pa制备YO1.401粘接层时,Y2O3/Er2O3/YOx涂层的结合力相比于Y2O3/Er2O3复合涂层,涂层与基体的结合力增大了约60%,纳米硬度增大了近30%,绝缘电阻率测试结果表明,Y2O3/Er2O3/YOx涂层绝缘电阻率在1×109Ω.cm^1×1011Ω.cm,绝缘性能良好。The influence of the YOx adhesion layer on YeO3/Er2O3 multilayered coatings were studied in the present work. The YeO3/Er2O3 multilayered coatings with a period of about 700 nm（five periods） were prepared on 316L stainless steel substrates by bipolar pulse reactive magnetron sputtering. The unsaturated YOx（x〈1.5） adhesion layer was deposited by adjusting the O2：Ar ratio during fabrication. Influences of the adhesion layer on the phase composition, surface morphology and bonding strength to substrates of the muhilayered coatings were tested using x-ray diffraction, .scanning electron microscopy, scratch tester and nano-indenter. The results revealed that the bonding strength to the substrates and nano-hardness of the muhilayered coatings with the YO1.401 adhesion layer deposited under an O2 partial pressure of 0.036 Pa increased by about 60% and 30% than coatings without the adhesion layer, respectively. The YeO3/Er2O3/YOx coatings had a high electrical resistivity ranging between 1×10^9Ω·cm～1×10^11Ω·cm.

关 键 词：氧化钇涂层 粘接层 反应溅射 结合力 纳米硬度 

分 类 号：TB35[一般工业技术—材料科学与工程]