基于激光跟踪仪的转台系统几何误差检测  

Measurement of Geometric Error of Rotary Stage System Based on Laser Tracker

作　　者：张振久[1] 胡泓[1] 

机构地区：[1]哈尔滨工业大学深圳研究生院,广东深圳518055

出　　处：《中国激光》2012年第11期180-186,共7页Chinese Journal of Lasers

基　　金：国家自然科学基金(60974069);深圳市科技计划(JC200903120188A)资助课题

摘　　要：转台系统是多轴机床的基本组件,因此转台系统的几何误差检测对于多轴机床的误差补偿有重要意义。提出了一种基于激光跟踪仪的转台系统几何误差检测方法,利用齐次坐标变换建立转台系统的误差模型,并给出几何误差与空间误差之间的关系。利用激光跟踪仪检测转台上不共线的三个点的空间坐标并得到各点的空间误差,再逆用误差模型,建立了包含六项几何误差的方程组。求解方程组,获得了转台系统的六项几何误差的解析表达式。将检测方法应用于某转台系统的几何误差检测,并通过对比实验证明了该方法的有效性。Rotary stage system is a fundamental part of multi-axis machine tools. Therefore, measuring geometric error of rotary stage system is significantly important for geometric error calibration of multi-axis machine tools. A method for measuring geometric error of rotary stage system based on laser tracker is proposed. Homogeneous transformation is applied to establish the mathematical model of geometric error of the rotary stage system which can explicitly describe the relationship between geometric errors and volumetric errors. The coordinates of three noncollinear points on the stage are detected by laser tracker and the volumetric errors of each point can be obtained too. The mathematical model of geometric error is performed inversely to achieve a system of equations which can be solved to obtain the six geometric errors of rotary stage system. This method is used to measure the geometric errors of a rotary stage, and the effectiveness of this method is validated by a comparison experiment.

关 键 词：测量 转台系统 几何误差检测 误差模型 激光跟踪仪 

分 类 号：TN247[电子电信—物理电子学]