基于电场分布特性的环形栅器件SPICE模型研究  

SPICE Model of Annular Gate Device Based on Electric Field Distribution

作　　者：张波[1] 肖立伊[1] 付方发[1] 

机构地区：[1]哈尔滨工业大学微电子中心,黑龙江哈尔滨150001

出　　处：《微电子学与计算机》2012年第12期140-144,共5页Microelectronics & Computer

基　　金：哈尔滨市科技创新人才研究专项基金(2012RFXXG042)

摘　　要：提出了一种新颖的、更加通用的环形栅器件版图等效宽度提取方法,用于解决目前商用SPICE模型中版图宽度提取方法不适用于环形栅器件这一问题.该方法基于环形栅中沟道电场分布特性,可用于提取多种形状环形栅版图宽度.提出了SPICE模型中模型参数的修改方法,使SPICE环形栅器件模型仿真更为精准.通过TCAD(计算机辅助设计)等多种仿真途径对该模型进行验证,结果表明该模型具有较高的精确度.A novel and universal model to calculate the effective width of edgeless FETs has been proposed in this paper to solve the problem that the calculations of effective width in commercial SPICE model does not fit annular gate devices. This model is based on channel electric field distribution in annular gate and can be used for most shapes of annular gate devices. Corrections of SPICE model parameters have been proposed to make the model more accurate. Verifications have also been done with different gate geometries in different ways such as TCAD （Technology Computer Aided Design） and so on. Simulations results show a good accuracy of the proposed model.

关 键 词：环形栅 电场分布 等效宽度 SPICE模型 TCAD 

分 类 号：TN702[电子电信—电路与系统]