通过二维数值仿真工具给出了加固前后1.7 kV碳化硅(4H-SiC)功率VDMOSFET单粒子烧毁(SEB)的仿真结果。研究结果表明,与传统的五缓冲层的VDMOSFET(FB-VDMOSFET)相比,改进后的VDMOSFET在高线性能量密度(linear energy transfer, LET)值范...
supported by the National Natural Science Foundation of China (623B2028).
The advanced fin-shaped field-effect transistor(FinFET)technology offers higher integration density and stronger channel control capabilities,however,more complex process effects are also introduced which have signifi...