基于微加工工艺的聚苯乙烯微针阵列研制  

Design and Fabrication of Micro Needles Array Based on UV-LIGA Technology

作　　者：廖哲勋[1] 李以贵[1] 朱军[1] 

机构地区：[1]上海交通大学微纳米技术研究院薄膜与微细技术教育部重点实验室,上海200240

出　　处：《上海交通大学学报》2012年第11期1848-1851,共4页Journal of Shanghai Jiaotong University

基　　金：国家自然科学基金资助项目(51035005);上海市浦江计划项目(09PJ1406200)

摘　　要：提出了一种聚苯乙烯(PS)微针阵列的微细加工工艺,即利用紫外线光刻技术在光刻胶上得到与准LIGA(Lithograpie(光刻),Galvanoformung(电铸),Abformung(铸塑))掩膜板图形相似的曝光能量分布图,再利用显影和转写技术获得断面形状与掩膜板图形相似的PS微针阵列结构.为了解决微针载药的加工问题,通过设计4孔凹槽结构实现空心孔的微细加工,获得了高度为400μm的PS微针阵列.该阵列面积约为22.18cm2,微针数约为6 240根.实验结果显示,新方法加工高质量高密度带凹槽结构实心微针的效果非常好.A new micro fabrication method {or micro needles array was presented. The method is ultraviolet ray lithography method, that is. obtaining exposure energy distribution in the PS resist plate similar to the patterns in the I.IGA （Lithograpie, Galvanoformung, Abformung） mask~ and after development,PS micro needles array whose cross section shape is similar to the shape of the LIGA mask is obtained. In order to solve the problem of microneedles array with the ability of medicine carrying fabrication, a structure with fourfold fabrication in the microneedle array was designed. Using the process, the fabricated microneedles height is 400 μm and its whole chip size is about 22.18 cm2 , and there are about 6 240 microneedles in this area. The experimental results show that the high quality solid microneedles array with the ability of medi cine carrying can be fabricated simply by this method.

关 键 词：无痛化注射 微针阵列 UV—LIGA工艺 

分 类 号：TH703[机械工程—仪器科学与技术]