基于压电材料的引线键合微夹持器设计  

Design of Micro-gripper in Wire Bond Based on Piezoelectric Material

作　　者：隆志力[1] 刘谋洋[2] 张建国[1] 

机构地区：[1]哈尔滨工业大学深圳研究生院,广东深圳518055 [2]东莞华中科技大学制造工程研究院,广东东莞523808

出　　处：《压电与声光》2012年第6期853-856,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(50605064);国家自然科学基金会(NSFC)-广东联合基金重点资助项目(U1134004);广东省重大专项基金资助项目(2011A080801004);广东省引进创新科研团队计划基金资助项目(2009010051)

摘　　要：引线微夹持器是IC/LED键合系统的关键模块。该文综合采用压电智能材料与柔性联接的组合结构,设计了键合系统的引线微夹持器。利用有限元法,计算了微夹持器的振动模态与静力特性,获得了系统的固有频率、振动模态及电信号驱动下的支臂端部张开量。在实验上,通过高速摄像系统的跟踪实验,捕获了系统支臂端部的运动行为,获得了系统张开量与驱动电压的关系;并用激光非接触测量技术,获得系统端部的振动特性。该文计算与实验均为引线微夹持器的可靠性应用提供基础。Micro-gripper is a key component in IC/LED＇wire bonder. A nonnative gripper combined with piezoelectric material and flexible structure is presented in this paper. The vibration modal and static characteristics of this gripper are calculated by finite element method. The natural frequency and vibration modal of the system; and the open amplitude of this gripper are attained. In the experiment, the high-speed camera is used to track the vibration of the gripper, and the relationship between the open amplitude and the driven voltage is attained. The vibration be havior is collected by a non-contact laser to verify the FEM calculations. These results can help to the application of this gripper used in wire bond.

关 键 词：微夹持器 压电智能材料 柔性联接 引线键合 

分 类 号：TN14[电子电信—物理电子学]